Measurement of velocities of copper nanoparticles exiting a gas aggregation source

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10454480" target="_blank" >RIV/00216208:11320/22:10454480 - isvavai.cz</a>

Výsledek na webu

<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=KKtI4bdoQY" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=KKtI4bdoQY</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2022.111114" target="_blank" >10.1016/j.vacuum.2022.111114</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of velocities of copper nanoparticles exiting a gas aggregation source

Popis výsledku v původním jazyce

Gas aggregation sources have become a valuable tool for the effective production of nanoparticles and nano-particle films. In some cases (e.g. during in-flight coating of nanoparticles or interaction between nanoparticles and substrate), the critical parameter that influences the applicability of these sources and properties of fabri-cated nanomaterials is the velocity of produced nanoparticles. Naturally, to control the speed of nanoparticles, it is crucial to determine how it is influenced by process parameters. A mechanical time-of-flight filter has been used to measure the velocities of nanoparticles exiting a magnetron-based gas aggregation source. Nanoparticle velocities have been investigated for various deposition conditions, including aggregation chamber pressure from 20 to 100 Pa, magnetron current from 100 to 500 mA and deposition chamber pressure from 0.015 to 2.5 Pa. Nanoparticles may be accelerated in the area around the exit orifice and decelerated by the background gas in the deposition chamber. This allows tailoring the nanoparticle velocity in the range from 10 m s(-1) up to over 100 m s(-1). Furthermore, the dependence of the velocity of nanoparticles on their size was found to obey a simple power law. Therefore, the filter may be used not only as a velocity filter but also as a mass filter.

Název v anglickém jazyce

Measurement of velocities of copper nanoparticles exiting a gas aggregation source

Popis výsledku anglicky

Gas aggregation sources have become a valuable tool for the effective production of nanoparticles and nano-particle films. In some cases (e.g. during in-flight coating of nanoparticles or interaction between nanoparticles and substrate), the critical parameter that influences the applicability of these sources and properties of fabri-cated nanomaterials is the velocity of produced nanoparticles. Naturally, to control the speed of nanoparticles, it is crucial to determine how it is influenced by process parameters. A mechanical time-of-flight filter has been used to measure the velocities of nanoparticles exiting a magnetron-based gas aggregation source. Nanoparticle velocities have been investigated for various deposition conditions, including aggregation chamber pressure from 20 to 100 Pa, magnetron current from 100 to 500 mA and deposition chamber pressure from 0.015 to 2.5 Pa. Nanoparticles may be accelerated in the area around the exit orifice and decelerated by the background gas in the deposition chamber. This allows tailoring the nanoparticle velocity in the range from 10 m s(-1) up to over 100 m s(-1). Furthermore, the dependence of the velocity of nanoparticles on their size was found to obey a simple power law. Therefore, the filter may be used not only as a velocity filter but also as a mass filter.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/GJ20-15405Y" target="_blank" >GJ20-15405Y: Studium interakce nanočástic produkovaných pomocí plynového agregačního zdroje se substrátem</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

1879-2715

Svazek periodika

202

Číslo periodika v rámci svazku

srpen

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

111114

Kód UT WoS článku

000800470900002

EID výsledku v databázi Scopus

2-s2.0-85129932095