Effect of exit-orifice size on Cu nanoparticles produced by gas-aggregation source
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43962657" target="_blank" >RIV/49777513:23520/21:43962657 - isvavai.cz</a>
Nalezeny alternativní kódy
RIV/49777513:23520/21:43963392
Výsledek na webu
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DOI - Digital Object Identifier
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Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
Effect of exit-orifice size on Cu nanoparticles produced by gas-aggregation source
Popis výsledku v původním jazyce
In nanoparticle production by magnetron sputtering and subsequent gas aggregation, there are many parameters influencing the process of nanoparticle formation. One of the key parameters is the pressure of the background working gas. The pressure is usually controlled by adjusting the flow rate, which however leads to an undesirable simultaneous change of two important parameters, both influencing the formation of the nanoparticles. In this work, we introduce an additional parameter influencing the pressure of the working gas. Changing the aggregation chamber exit-orifice size allows us to change the pressure and flow rate independently and separate their effects. The experimental results show that the conventional approach of changing pressure by adjusting the flow rate (at a constant orifice diameter) does not significantly influence the nanoparticle size or their deposition rate. However, when the pressure or the flow rate is held constant, changing the other parameter has a notable effect. We suggest that the determining parameter which needs to be considered is the pressure to flow rate ratio. This ratio determines the residence time of the nanoparticles inside the aggregation chamber (and therefore the time available for them to grow) and is constant for a constant orifice diameter. Decreasing the orifice diameter, however, increases the pressure to flow rate ratio, gives the nanoparticles longer time inside the aggregation chamber and allows them to grow larger. Apart from their size, the orifice diameter also influences the deposition rate and its angular distribution.
Název v anglickém jazyce
Effect of exit-orifice size on Cu nanoparticles produced by gas-aggregation source
Popis výsledku anglicky
In nanoparticle production by magnetron sputtering and subsequent gas aggregation, there are many parameters influencing the process of nanoparticle formation. One of the key parameters is the pressure of the background working gas. The pressure is usually controlled by adjusting the flow rate, which however leads to an undesirable simultaneous change of two important parameters, both influencing the formation of the nanoparticles. In this work, we introduce an additional parameter influencing the pressure of the working gas. Changing the aggregation chamber exit-orifice size allows us to change the pressure and flow rate independently and separate their effects. The experimental results show that the conventional approach of changing pressure by adjusting the flow rate (at a constant orifice diameter) does not significantly influence the nanoparticle size or their deposition rate. However, when the pressure or the flow rate is held constant, changing the other parameter has a notable effect. We suggest that the determining parameter which needs to be considered is the pressure to flow rate ratio. This ratio determines the residence time of the nanoparticles inside the aggregation chamber (and therefore the time available for them to grow) and is constant for a constant orifice diameter. Decreasing the orifice diameter, however, increases the pressure to flow rate ratio, gives the nanoparticles longer time inside the aggregation chamber and allows them to grow larger. Apart from their size, the orifice diameter also influences the deposition rate and its angular distribution.
Klasifikace
Druh
O - Ostatní výsledky
CEP obor
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OECD FORD obor
20506 - Coating and films
Návaznosti výsledku
Projekt
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Návaznosti
S - Specificky vyzkum na vysokych skolach
Ostatní
Rok uplatnění
2021
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů