Koncentrace elektronů a tok iontů v difúzní komoře nízkotlakého vf helikonového reaktoru

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00016195" target="_blank" >RIV/00216224:14310/06:00016195 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor

Popis výsledku v původním jazyce

The electron density, ion flux and argon emission lines were measured in a radio frequency helicon reactor for different static magnetic field amplitude and low rf powers using cylindrical Langmuir probe, planar probe and optical emission spectroscopy (OES). The static magnetic field amplitude created around the plasma source varied from 0 to 10 mT in the helicon source and from 0 to 1.4 mT in the diffusion chamber. The discharge was created in argon and oxygen at 0.7 Pa with rf powers, between 50 and 600~W, applied to the helicon antenna. The variations of the electron density, ion flux taken from Langmuir probe measurement and from planar probe measurement and Ar 750 nm line intensity with the rf power were in good agreement. Hence, it is concluded that the maximum of electron density observed in the diffusion chamber for the highest values of magnetic field is likely to be due to some confinement of the plasma in the source. Measurements in oxygen discharge showed slightly different

Název v anglickém jazyce

Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor

Popis výsledku anglicky

The electron density, ion flux and argon emission lines were measured in a radio frequency helicon reactor for different static magnetic field amplitude and low rf powers using cylindrical Langmuir probe, planar probe and optical emission spectroscopy (OES). The static magnetic field amplitude created around the plasma source varied from 0 to 10 mT in the helicon source and from 0 to 1.4 mT in the diffusion chamber. The discharge was created in argon and oxygen at 0.7 Pa with rf powers, between 50 and 600~W, applied to the helicon antenna. The variations of the electron density, ion flux taken from Langmuir probe measurement and from planar probe measurement and Ar 750 nm line intensity with the rf power were in good agreement. Hence, it is concluded that the maximum of electron density observed in the diffusion chamber for the highest values of magnetic field is likely to be due to some confinement of the plasma in the source. Measurements in oxygen discharge showed slightly different

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GD202%2F03%2FH162" target="_blank" >GD202/03/H162: Pokročilé směry ve fyzice a chemii plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS'06 Proceedings of Contributed Papers, Part II

ISBN

80-86732-85-1

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

150-155

Název nakladatele

MATFYZPRESS

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

1. 1. 2006

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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