Studium vlivu magnetického pole na nabité částice v nízkotlakém helikonovém reaktoru

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00015838" target="_blank" >RIV/00216224:14310/06:00015838 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Study of magnetic field influence on charged species in a low pressure helicon reactor

Popis výsledku v původním jazyce

The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy.The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7~Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750~nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results.

Název v anglickém jazyce

Study of magnetic field influence on charged species in a low pressure helicon reactor

Popis výsledku anglicky

The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy.The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7~Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750~nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GD202%2F03%2FH162" target="_blank" >GD202/03/H162: Pokročilé směry ve fyzice a chemii plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Czechoslovak Journal of Physics

ISSN

0011-4626

e-ISSN

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Svazek periodika

56

Číslo periodika v rámci svazku

suppl. B

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

6

Strana od-do

1091-1096

Kód UT WoS článku

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EID výsledku v databázi Scopus

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