Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F09%3A00029277" target="_blank" >RIV/00216224:14310/09:00029277 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00177016:_____/09:#0000352 RIV/00216305:26210/09:PU79404

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Popis výsledku v původním jazyce

Complete optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic imaging reflectometry (SIR). It is shown that by using this technique it is possible to determine the area distribution (area map) of the local thickness of these films with arbitrary shape of this thickness non-uniformity. Furthermore, it is shown that in principle it is possible to determine the distributions of the refractive index and extinction coefficient of these films simultaneously with the thickness distribution, if a suitable dispersion model of these optical constants is chosen. In this paper the dispersion model of the optical constants of the DLC films based on parameterization of density of electronic states (DOS) is used. The values of the material parameters of this dispersion model are determined too. It is shown that the DLC films studied do not exhibit the area non-uniformity in material parameters and optical constants.

Název v anglickém jazyce

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Popis výsledku anglicky

Complete optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic imaging reflectometry (SIR). It is shown that by using this technique it is possible to determine the area distribution (area map) of the local thickness of these films with arbitrary shape of this thickness non-uniformity. Furthermore, it is shown that in principle it is possible to determine the distributions of the refractive index and extinction coefficient of these films simultaneously with the thickness distribution, if a suitable dispersion model of these optical constants is chosen. In this paper the dispersion model of the optical constants of the DLC films based on parameterization of density of electronic states (DOS) is used. The values of the material parameters of this dispersion model are determined too. It is shown that the DLC films studied do not exhibit the area non-uniformity in material parameters and optical constants.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Svazek periodika

18

Číslo periodika v rámci svazku

2-3

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

4

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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