Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F11%3A00051581" target="_blank" >RIV/00216224:14310/11:00051581 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.tsf.2010.12.063" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2010.12.063</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2010.12.063" target="_blank" >10.1016/j.tsf.2010.12.063</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

Popis výsledku v původním jazyce

Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time.

Název v anglickém jazyce

Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

Popis výsledku anglicky

Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

—

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

519

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

4

Strana od-do

2703-2706

Kód UT WoS článku

000289174200029

EID výsledku v databázi Scopus

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