TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00066348" target="_blank" >RIV/00216224:14310/13:00066348 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron

Popis výsledku v původním jazyce

Hybrid PVD-PECVD process of titanium sputtering in a mixture of argon and acetylene combines aspects of both conventional techniques: sputtering of a rotating cylindrical titanium sputtering target (target size: 110 x 510 mm) by DC power and deposition from plasma activated acetylene which acts as a source of carbon for polymerization (PECVD). Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited on high speed steel and tungsten carbide cermet substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW(450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively.

Název v anglickém jazyce

TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron

Popis výsledku anglicky

Hybrid PVD-PECVD process of titanium sputtering in a mixture of argon and acetylene combines aspects of both conventional techniques: sputtering of a rotating cylindrical titanium sputtering target (target size: 110 x 510 mm) by DC power and deposition from plasma activated acetylene which acts as a source of carbon for polymerization (PECVD). Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanocrystallites embedded in amorphous carbon matrix (nc-TiC/a-C:H coating), were deposited on high speed steel and tungsten carbide cermet substrates which were placed on a DC biasable holder performing complex rotation around the Ti cathode. nc-TiC/a-C:H coatings with varying chemical composition prepared at 10 kW DC power (320 C), 20 kW(450 C) and 30 kW (450 C) and bias of -100 V reached maximal hardness of 24 GPa, 37 GPa and 28 GPa respectively.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů