Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F16%3A00088074" target="_blank" >RIV/00216224:14310/16:00088074 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.06.061" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2016.06.061</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.06.061" target="_blank" >10.1016/j.surfcoat.2016.06.061</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Popis výsledku v původním jazyce

A study of a hybrid PVD-PECVD process of sputtering a titanium target in an argon/acetylene gas mixture was performed. This process was used for the deposition of nanocomposite coatings consisting of titanium carbide grains embedded in an amorphous hydrogenated carbon matrix (nc-TiC/a-C:H). The study was performed under industrial conditions employing a large-scale deposition device with a cylindrical sputtering cathode. When the acetylene supply was gradually increased, a discharge voltage drop and total pressure saturation simultaneously occurred at a certain acetylene supply. The hardest coatings were found always to be deposited at the acetylene supply corresponding to these deposition conditions. However, the acetylene supply to detect the voltage drop and pressure saturation was determined to be dependent on the cathode thickness. A fully automatic procedure suitable for the preparation of hard nc-TiC/a-C:H coatings by the hybrid PVD-PECVD process was proposed in this paper.

Název v anglickém jazyce

Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Popis výsledku anglicky

A study of a hybrid PVD-PECVD process of sputtering a titanium target in an argon/acetylene gas mixture was performed. This process was used for the deposition of nanocomposite coatings consisting of titanium carbide grains embedded in an amorphous hydrogenated carbon matrix (nc-TiC/a-C:H). The study was performed under industrial conditions employing a large-scale deposition device with a cylindrical sputtering cathode. When the acetylene supply was gradually increased, a discharge voltage drop and total pressure saturation simultaneously occurred at a certain acetylene supply. The hardest coatings were found always to be deposited at the acetylene supply corresponding to these deposition conditions. However, the acetylene supply to detect the voltage drop and pressure saturation was determined to be dependent on the cathode thickness. A fully automatic procedure suitable for the preparation of hard nc-TiC/a-C:H coatings by the hybrid PVD-PECVD process was proposed in this paper.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface & coatings technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

304

Číslo periodika v rámci svazku

October

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

7

Strana od-do

9-15

Kód UT WoS článku

000384775900002

EID výsledku v databázi Scopus

—