Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057712" target="_blank" >RIV/00216224:14310/12:00057712 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings

Popis výsledku v původním jazyce

Hybrid PVD-PECVD process of titanium sputtering in argon and acetylene has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix. nc-TiC/a-C:H layers showed promisingcombination of properties such as high hardness and Young?s modulus with low friction and wear making it an industrially attractive material for protective coatings and tribological applications. Hybrid PVD-PECVD process that combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD) was studied. The aim of this contribution is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. We report a non-monotonous evolution of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow. We propose an explanation of non-monotonous evolutions through the analysis of the target state.

Název v anglickém jazyce

Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings

Popis výsledku anglicky

Hybrid PVD-PECVD process of titanium sputtering in argon and acetylene has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix. nc-TiC/a-C:H layers showed promisingcombination of properties such as high hardness and Young?s modulus with low friction and wear making it an industrially attractive material for protective coatings and tribological applications. Hybrid PVD-PECVD process that combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD) was studied. The aim of this contribution is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. We report a non-monotonous evolution of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow. We propose an explanation of non-monotonous evolutions through the analysis of the target state.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů