Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00073316" target="_blank" >RIV/00216224:14310/14:00073316 - isvavai.cz</a>

Výsledek na webu

<a href="http://ac.els-cdn.com/S0040609014002533/1-s2.0-S0040609014002533-main.pdf?_tid=1164e0f6-cca0-11e4-ac1b-00000aab0f01&acdnat=1426595038_4b3a79a484100725154217605bb36278" target="_blank" >http://ac.els-cdn.com/S0040609014002533/1-s2.0-S0040609014002533-main.pdf?_tid=1164e0f6-cca0-11e4-ac1b-00000aab0f01&acdnat=1426595038_4b3a79a484100725154217605bb36278</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2014.02.092" target="_blank" >10.1016/j.tsf.2014.02.092</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

Popis výsledku v původním jazyce

Expressions for ellipsometric quantities and reflectance presented are based on a heuristic combination of the Rayleigh-Rice theory and the scalar diffraction theory. The latter takes into account the local slopes and shadowing. The second-order Rayleigh-Rice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of thequadruple integral resulting from this combination of the two theories is developed, utilising a Gauss-like quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created usinganodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. (C) 2014 Elsevier B.V. All rights reserved.

Název v anglickém jazyce

Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

Popis výsledku anglicky

Expressions for ellipsometric quantities and reflectance presented are based on a heuristic combination of the Rayleigh-Rice theory and the scalar diffraction theory. The latter takes into account the local slopes and shadowing. The second-order Rayleigh-Rice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of thequadruple integral resulting from this combination of the two theories is developed, utilising a Gauss-like quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created usinganodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. (C) 2014 Elsevier B.V. All rights reserved.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

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Svazek periodika

571

Číslo periodika v rámci svazku

November

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

6

Strana od-do

695-700

Kód UT WoS článku

000346055200068

EID výsledku v databázi Scopus

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