On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00074183" target="_blank" >RIV/00216224:14310/14:00074183 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
Popis výsledku v původním jazyce
HiPIMS is promising technique for depositing thin layers. Instabilities accompanying HiPIMS also known as spokes were firstly observed independently by Anders et al and Kozyrev et al. Since then, OES and Langmuir probes are usually used for spoke diagnostics. In our research, periodic oscillations were not only observed on OES, but also on cathode voltage and discharge current. Alcatel SCM 650 sputtering system equipped with 20 cm titanium target and balanced magnetic field configuration was employed. Melec SIPP 2000 HiPIMS generator with maximum allowed voltage of 1000 V and maximum allowed current of 500 A was used. The generator was operated in constant voltage mode; discharge duration was 200 us with repetition frequency of 50 Hz. When the discharge current overreached typically 250 A, the periodic oscillations of discharge current and cathode voltage with frequency around 350 kHz were observed.
Název v anglickém jazyce
On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
Popis výsledku anglicky
HiPIMS is promising technique for depositing thin layers. Instabilities accompanying HiPIMS also known as spokes were firstly observed independently by Anders et al and Kozyrev et al. Since then, OES and Langmuir probes are usually used for spoke diagnostics. In our research, periodic oscillations were not only observed on OES, but also on cathode voltage and discharge current. Alcatel SCM 650 sputtering system equipped with 20 cm titanium target and balanced magnetic field configuration was employed. Melec SIPP 2000 HiPIMS generator with maximum allowed voltage of 1000 V and maximum allowed current of 500 A was used. The generator was operated in constant voltage mode; discharge duration was 200 us with repetition frequency of 50 Hz. When the discharge current overreached typically 250 A, the periodic oscillations of discharge current and cathode voltage with frequency around 350 kHz were observed.
Klasifikace
Druh
O - Ostatní výsledky
CEP obor
BL - Fyzika plasmatu a výboje v plynech
OECD FORD obor
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Návaznosti výsledku
Projekt
Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Ostatní
Rok uplatnění
2014
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů