Magnetic field effect on spoke behaviour

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F16%3A00088258" target="_blank" >RIV/00216224:14310/16:00088258 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Magnetic field effect on spoke behaviour

Popis výsledku v původním jazyce

The investigations of the non-reactive high power impulse magnetron sputtering (HiPIMS) discharge using high-speed camera imaging, optical emission spectroscopy and electrical probes showed that plasma is not homogeneously distributed over the target surface, but it is concentrated in regions of higher local plasma density called spokes rotating above the erosion racetrack. Magnetic field effect on spoke behaviour was studied by high-speed camera imaging in HiPIMS discharge using 3 inch titanium target. An employed camera enabled us to record two successive images in the same pulse with time delay of 3 us between them, which allowed us to determine the number of spokes, spoke rotation velocity and spoke rotation frequency. The experimental conditions covered pressure range from 0.15 to 5 Pa, discharge current up to 350 A and magnetic fields of 37, 72 and 91 mT. Increase of the magnetic field influenced the number of spokes observed at the same pressure and at the same discharge current.

Název v anglickém jazyce

Magnetic field effect on spoke behaviour

Popis výsledku anglicky

The investigations of the non-reactive high power impulse magnetron sputtering (HiPIMS) discharge using high-speed camera imaging, optical emission spectroscopy and electrical probes showed that plasma is not homogeneously distributed over the target surface, but it is concentrated in regions of higher local plasma density called spokes rotating above the erosion racetrack. Magnetic field effect on spoke behaviour was studied by high-speed camera imaging in HiPIMS discharge using 3 inch titanium target. An employed camera enabled us to record two successive images in the same pulse with time delay of 3 us between them, which allowed us to determine the number of spokes, spoke rotation velocity and spoke rotation frequency. The experimental conditions covered pressure range from 0.15 to 5 Pa, discharge current up to 350 A and magnetic fields of 37, 72 and 91 mT. Increase of the magnetic field influenced the number of spokes observed at the same pressure and at the same discharge current.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů