STUDY OF NITROGEN DOPED ORGANOSILICON PLASMA POLYMER THIN FILMS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00095984" target="_blank" >RIV/00216224:14310/17:00095984 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

STUDY OF NITROGEN DOPED ORGANOSILICON PLASMA POLYMER THIN FILMS

Popis výsledku v původním jazyce

Plasma polymerized hexamethyldisiloxane coatings have been attracting interest of many researches. Due to their properties, these materials have a great potential to succeed in large field of applications such as protective anti-scratch layers on plastic substrates, corrosion protection coatings, barrier films for pharmaceutical packaging etc. Functionalized organosilicon plasma polymers have been investigated for development of unique biomaterials. Addition of a suitable dopant during plasma polymerization is one of the ways to form specific functionalities modulating chemistry, physical properties as well as biocompatibility of the films. In the present work, low pressure RF capacitively coupled discharge was used to deposit organosilicon thin films with nitrogen-containing functional groups on single crystalline silicon substrates. Resulting plasma polymers were investigated by several methods aimed primarily at determination of chemical composition, surface microstructure and mechanical properties. The present study includes results of Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, confocal microscopy, atomic force microscopy and nanoindentation, and their comparison with respect to deposition parameters.

Název v anglickém jazyce

STUDY OF NITROGEN DOPED ORGANOSILICON PLASMA POLYMER THIN FILMS

Popis výsledku anglicky

Plasma polymerized hexamethyldisiloxane coatings have been attracting interest of many researches. Due to their properties, these materials have a great potential to succeed in large field of applications such as protective anti-scratch layers on plastic substrates, corrosion protection coatings, barrier films for pharmaceutical packaging etc. Functionalized organosilicon plasma polymers have been investigated for development of unique biomaterials. Addition of a suitable dopant during plasma polymerization is one of the ways to form specific functionalities modulating chemistry, physical properties as well as biocompatibility of the films. In the present work, low pressure RF capacitively coupled discharge was used to deposit organosilicon thin films with nitrogen-containing functional groups on single crystalline silicon substrates. Resulting plasma polymers were investigated by several methods aimed primarily at determination of chemical composition, surface microstructure and mechanical properties. The present study includes results of Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, confocal microscopy, atomic force microscopy and nanoindentation, and their comparison with respect to deposition parameters.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

8TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2016)

ISBN

9788087294710

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

727-732

Název nakladatele

TANGER Ltd

Místo vydání

Brno

Místo konání akce

Brno

Datum konání akce

19. 10. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000410656100126