Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00096014" target="_blank" >RIV/00216224:14310/17:00096014 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S025789721730021X" target="_blank" >http://www.sciencedirect.com/science/article/pii/S025789721730021X</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.01.021" target="_blank" >10.1016/j.surfcoat.2017.01.021</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties

Popis výsledku v původním jazyce

Nanocomposite coatings consisting of titanium carbide crystallites embedded in amorphous carbon matrix were deposited utilizing direct current magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HiPIMS) of titanium target in argon/acetylene atmosphere. DC driven depositions of coatings with high amount of carbon were accompanied by significant arcing during the deposition. HiPIMS utilization made reliable arc-free deposition of coatings with high carbon content possible. Analyses of the coating structure revealed that utilization of HiPIMS favours carbon incorporation into the TiCx grains rather than to the matrix. HiPIMS deposited coatings exhibited stoichiometry of the TiCx grains closer to unity with grains exhibiting lower lattice parameter and a lower fraction of the a-C matrix. This led to a smaller mean TiCx grain separation by the a-C:H matrix. Also the surface structure of the HiPIMS deposited coatings was much finer. The structure refinement resulted in overall higher hardness of HiPIMS deposited coatings with the hardest coatings reaching the superhard region of &gt; 40 GPa and in 40% increase of H/E ratio and nearly threefold increase of H3/E2 ratio.

Název v anglickém jazyce

Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties

Popis výsledku anglicky

Nanocomposite coatings consisting of titanium carbide crystallites embedded in amorphous carbon matrix were deposited utilizing direct current magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HiPIMS) of titanium target in argon/acetylene atmosphere. DC driven depositions of coatings with high amount of carbon were accompanied by significant arcing during the deposition. HiPIMS utilization made reliable arc-free deposition of coatings with high carbon content possible. Analyses of the coating structure revealed that utilization of HiPIMS favours carbon incorporation into the TiCx grains rather than to the matrix. HiPIMS deposited coatings exhibited stoichiometry of the TiCx grains closer to unity with grains exhibiting lower lattice parameter and a lower fraction of the a-C matrix. This led to a smaller mean TiCx grain separation by the a-C:H matrix. Also the surface structure of the HiPIMS deposited coatings was much finer. The structure refinement resulted in overall higher hardness of HiPIMS deposited coatings with the hardest coatings reaching the superhard region of &gt; 40 GPa and in 40% increase of H/E ratio and nearly threefold increase of H3/E2 ratio.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface & coatings technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

311

Číslo periodika v rámci svazku

February

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

11

Strana od-do

257-267

Kód UT WoS článku

000395355300030

EID výsledku v databázi Scopus

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