Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F19%3A00107859" target="_blank" >RIV/00216224:14310/19:00107859 - isvavai.cz</a>

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture

Popis výsledku v původním jazyce

In this work, the nitrogen gas admixture effect on the temporal evolution of discharge current, voltage, pressure and ionization fraction of sputtered species in HiPIMS process is analyzed. The temporal evolution of an absolute number of sputtered titanium atom and ion density is estimated during the HiPIMS pulse using the spectroscopic method based on effective branching fractions. Furthermore, from the sputtered titanium atom and ion densities, the ionized titanium density fraction is estimated in the magnetized plasma region close to the cathode. The temporal ionized titanium density fraction evolution is similar to titanium ion density evolution across the all hysteresis curve. The ionization fraction of the sputtered species is around 90 % independently on the nitrogen gas flow.

Název v anglickém jazyce

Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture

Popis výsledku anglicky

In this work, the nitrogen gas admixture effect on the temporal evolution of discharge current, voltage, pressure and ionization fraction of sputtered species in HiPIMS process is analyzed. The temporal evolution of an absolute number of sputtered titanium atom and ion density is estimated during the HiPIMS pulse using the spectroscopic method based on effective branching fractions. Furthermore, from the sputtered titanium atom and ion densities, the ionized titanium density fraction is estimated in the magnetized plasma region close to the cathode. The temporal ionized titanium density fraction evolution is similar to titanium ion density evolution across the all hysteresis curve. The ionization fraction of the sputtered species is around 90 % independently on the nitrogen gas flow.

Druh

O - Ostatní výsledky

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/GA19-00579S" target="_blank" >GA19-00579S: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů