Reactive argon/acetylene HiPIMS discharge ? time-resolved diagnostic of present species
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081051" target="_blank" >RIV/00216224:14310/15:00081051 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
Reactive argon/acetylene HiPIMS discharge ? time-resolved diagnostic of present species
Popis výsledku v původním jazyce
Temporal evolution of the selected emission line intensities ? H line, atom and ion line of Ti and Ar ? were measured during the 400us HiPIMS pulse for different acetylene flows. Moreover, densities of sputtered titanium atoms and ions in their ground levels were determined using spectroscopic technique based on effective branching fractions. The technique is based on fitting theoretically calculated branching fractions to experimentally measured fractions of the relative intensities of carefully selected lines of the measured species. Dependencies of intensities of selected species and Ti atom and ion densities on discharge current evolution were studied and were compared for selected acetylene flows.
Název v anglickém jazyce
Reactive argon/acetylene HiPIMS discharge ? time-resolved diagnostic of present species
Popis výsledku anglicky
Temporal evolution of the selected emission line intensities ? H line, atom and ion line of Ti and Ar ? were measured during the 400us HiPIMS pulse for different acetylene flows. Moreover, densities of sputtered titanium atoms and ions in their ground levels were determined using spectroscopic technique based on effective branching fractions. The technique is based on fitting theoretically calculated branching fractions to experimentally measured fractions of the relative intensities of carefully selected lines of the measured species. Dependencies of intensities of selected species and Ti atom and ion densities on discharge current evolution were studied and were compared for selected acetylene flows.
Klasifikace
Druh
O - Ostatní výsledky
CEP obor
BL - Fyzika plasmatu a výboje v plynech
OECD FORD obor
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Návaznosti výsledku
Projekt
Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.
Návaznosti
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Ostatní
Rok uplatnění
2015
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů