Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114424" target="_blank" >RIV/00216224:14310/20:00114424 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.3390/coatings10090853" target="_blank" >https://doi.org/10.3390/coatings10090853</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/coatings10090853" target="_blank" >10.3390/coatings10090853</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings

Popis výsledku v původním jazyce

Ta-B-C coatings were non-reactively sputter-deposited in an industrial batch coater from a single segmented rotating cylindrical cathode employing a combinatorial approach. The chemical composition, morphology, microstructure, mechanical properties, and fracture resistance of the coatings were investigated. Their mechanical properties were linked to their microstructure and phase composition. Coatings placed stationary in front of the racetrack of the target and those performing a 1-axis rotation around the substrate carousel are compared. Utilization of the substrate rotation has no significant effect on the chemical composition of the coatings deposited at the same position compared to the cathode. Whereas the morphology of coatings with corresponding chemical composition is similar for stationary as well as rotating samples, the rotating coatings exhibit a distinct multilayered structure with a repetition period in the range of nanometers despite utilizing a non-reactive process and a single sputter source. All the coatings are either amorphous, nanocomposite or nanocrystalline depending on their chemical composition. The presence of TaC, TaB, and/or TaB2phases is identified. The crystallite size is typically less than 5 nm. The highest hardness of the coatings is associated with the presence of larger grains in a nanocomposite structure or formation of polycrystalline coatings. The number, density, and length of cracks observed after high-load indentation is on par with current optimized commercially available protective coatings.

Název v anglickém jazyce

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings

Popis výsledku anglicky

Ta-B-C coatings were non-reactively sputter-deposited in an industrial batch coater from a single segmented rotating cylindrical cathode employing a combinatorial approach. The chemical composition, morphology, microstructure, mechanical properties, and fracture resistance of the coatings were investigated. Their mechanical properties were linked to their microstructure and phase composition. Coatings placed stationary in front of the racetrack of the target and those performing a 1-axis rotation around the substrate carousel are compared. Utilization of the substrate rotation has no significant effect on the chemical composition of the coatings deposited at the same position compared to the cathode. Whereas the morphology of coatings with corresponding chemical composition is similar for stationary as well as rotating samples, the rotating coatings exhibit a distinct multilayered structure with a repetition period in the range of nanometers despite utilizing a non-reactive process and a single sputter source. All the coatings are either amorphous, nanocomposite or nanocrystalline depending on their chemical composition. The presence of TaC, TaB, and/or TaB2phases is identified. The crystallite size is typically less than 5 nm. The highest hardness of the coatings is associated with the presence of larger grains in a nanocomposite structure or formation of polycrystalline coatings. The number, density, and length of cracks observed after high-load indentation is on par with current optimized commercially available protective coatings.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Coatings

ISSN

2079-6412

e-ISSN

—

Svazek periodika

10

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

18

Strana od-do

1-18

Kód UT WoS článku

000580431900001

EID výsledku v databázi Scopus

2-s2.0-85090788427