Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00125689" target="_blank" >RIV/00216224:14310/22:00125689 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0257897222003322" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897222003322</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128411" target="_blank" >10.1016/j.surfcoat.2022.128411</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target

Popis výsledku v původním jazyce

Computational methods have been gaining more and more attention as they provide a powerful tool for increasing efficiency in the industrial use of magnetron sputtering and provide results from which experimental work benefits. This work presents an approach for the prediction of the composition and the deposition rate of the coatings. The combination of SDTrimSP and SiMTra provides a framework for the simulation of the deposition process. The chemical composition and the deposition rate of industrially sputtered W-B-C coatings were investigated. An industrial batch coater with a complex geometry was modelled. A cylindrical rotating sputter source was mounted with a segmented target composed of W, B4C, and C segments. The simulated chemical composition and the relative deposition rate were verified and validated by experiments. A correlation between the chemical composition and target segment placement is presented, and the influence of substrate movement on the chemical composition is discussed. A single-axis rotation of the substrate placed on an industrial carousel causes a lowering of the content of tungsten in the coatings in comparison to statically placed substrates in front of the sputter source. The simulations uncover the distinct trajectories of the heavy and light particles. The different transport of particles from target to substrate results in the observed shift of chemical composition and also explains the inherent nanolayering of the non-reactively deposited coatings in the industrial batch coater.

Název v anglickém jazyce

Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target

Popis výsledku anglicky

Computational methods have been gaining more and more attention as they provide a powerful tool for increasing efficiency in the industrial use of magnetron sputtering and provide results from which experimental work benefits. This work presents an approach for the prediction of the composition and the deposition rate of the coatings. The combination of SDTrimSP and SiMTra provides a framework for the simulation of the deposition process. The chemical composition and the deposition rate of industrially sputtered W-B-C coatings were investigated. An industrial batch coater with a complex geometry was modelled. A cylindrical rotating sputter source was mounted with a segmented target composed of W, B4C, and C segments. The simulated chemical composition and the relative deposition rate were verified and validated by experiments. A correlation between the chemical composition and target segment placement is presented, and the influence of substrate movement on the chemical composition is discussed. A single-axis rotation of the substrate placed on an industrial carousel causes a lowering of the content of tungsten in the coatings in comparison to statically placed substrates in front of the sputter source. The simulations uncover the distinct trajectories of the heavy and light particles. The different transport of particles from target to substrate results in the observed shift of chemical composition and also explains the inherent nanolayering of the non-reactively deposited coatings in the industrial batch coater.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Svazek periodika

438

Číslo periodika v rámci svazku

May

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000793053500002

EID výsledku v databázi Scopus

2-s2.0-85127830480