The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00126854" target="_blank" >RIV/00216224:14310/22:00126854 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/62156489:43210/22:43921703

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0925963522004277#" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0925963522004277#</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2022.109245" target="_blank" >10.1016/j.diamond.2022.109245</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

Popis výsledku v původním jazyce

Optical characterization from the FIR to the V-UV region of silicon and oxygen doped carbon films deposited on a silicon substrates is performed. In this work, the deposited films are considered as optically inhomogeneous, i.e., the optical constants depend on the depth in the films. According to the optical analysis, there is a transition layers under the deposited films with optical constants similar to amorphous silicon with hydrogen, carbon and oxygen additions. The film thicknesses obtained from optical characterization are compared with those obtained from scanning electron microscope images. From electron microscope images it is evident that the film properties are truly depth-dependent. The optical constants of the films and transition layers as functions of photon energy over the studied spectrum are determined. The static conductivity of the films is determined from measurements in FIR region. From spectral analysis in the mid-infrared region, resonance peaks were detected and the chemical composition of the film and transition layers is presented. The chemical composition is compared with the results of the EDX.

Název v anglickém jazyce

The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

Popis výsledku anglicky

Optical characterization from the FIR to the V-UV region of silicon and oxygen doped carbon films deposited on a silicon substrates is performed. In this work, the deposited films are considered as optically inhomogeneous, i.e., the optical constants depend on the depth in the films. According to the optical analysis, there is a transition layers under the deposited films with optical constants similar to amorphous silicon with hydrogen, carbon and oxygen additions. The film thicknesses obtained from optical characterization are compared with those obtained from scanning electron microscope images. From electron microscope images it is evident that the film properties are truly depth-dependent. The optical constants of the films and transition layers as functions of photon energy over the studied spectrum are determined. The static conductivity of the films is determined from measurements in FIR region. From spectral analysis in the mid-infrared region, resonance peaks were detected and the chemical composition of the film and transition layers is presented. The chemical composition is compared with the results of the EDX.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

1879-0062

Svazek periodika

128

Číslo periodika v rámci svazku

October 2022

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

16

Strana od-do

1-16

Kód UT WoS článku

000838984700007

EID výsledku v databázi Scopus

2-s2.0-85134880038