Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00129519" target="_blank" >RIV/00216224:14310/22:00129519 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751" target="_blank" >https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128954" target="_blank" >10.1016/j.surfcoat.2022.128954</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model

Popis výsledku v původním jazyce

This work presents a novel particle-based computational model capable of predicting coating distribution and composition on real parts in ion-based physical vapor deposition (PVD) processes. The model treats ions as particles (using test particle Monte Carlo method) and electrons as a fluid (using Boltzmann's relation). This combination makes it possible to simulate a realistic plasma sheath around a coated part and locally enhanced electric field around the part's edges. This simulation tool is instrumental especially in predicting the so-called “antenna-effect” - i.e. changes in coating thickness and composition near sharp edges of coated parts. It can also be used for quantifying the effect of coater loading or fixture design, as illustrated by simulating the effect of a top-plate on the coating distribution. The model is validated by two experimental data sets - a milling tool and a drill bit, both coated by hard nitride coatings in a vacuum arc process.

Název v anglickém jazyce

Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model

Popis výsledku anglicky

This work presents a novel particle-based computational model capable of predicting coating distribution and composition on real parts in ion-based physical vapor deposition (PVD) processes. The model treats ions as particles (using test particle Monte Carlo method) and electrons as a fluid (using Boltzmann's relation). This combination makes it possible to simulate a realistic plasma sheath around a coated part and locally enhanced electric field around the part's edges. This simulation tool is instrumental especially in predicting the so-called “antenna-effect” - i.e. changes in coating thickness and composition near sharp edges of coated parts. It can also be used for quantifying the effect of coater loading or fixture design, as illustrated by simulating the effect of a top-plate on the coating distribution. The model is validated by two experimental data sets - a milling tool and a drill bit, both coated by hard nitride coatings in a vacuum arc process.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/FW03010533" target="_blank" >FW03010533: Numerické modely pro optimalizaci inovativních supertvrdých materiálů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Svazek periodika

449

Číslo periodika v rámci svazku

November

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

9

Strana od-do

1-9

Kód UT WoS článku

000876480100002

EID výsledku v databázi Scopus

2-s2.0-85139992452