Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F19%3A00113364" target="_blank" >RIV/00216224:14740/19:00113364 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture

Popis výsledku v původním jazyce

Optical emission spectroscopy is a technique for analysis of optical radiation from plasma source (or other light sources). In this contribution we are studying light emission from argon and argon cyclopropylamine (CPA) mixture in capacitively coupled plasma generated in plasma enhanced chemical vapor deposition reactor R4 at CEITEC Nano. Pressure inside of the reactor was 50 Pa (Ar flow 10 sccm and for mixture Ar flow 10 sccm and CPA flow 1 sccm) and power was set for 5 W and 50 W for both cases. Recording of spectra was done using Andor Shamrock SR-500i coupled with Newton 971 EMCCD spectroscopic detector. Measured spectral range was from 200 nm to 1000 nm. In all measured spectra we focused on detection and identification of Argon atomic lines. In Ar–CPA mixture we observe emission of molecular fragments as well. Plasma parameter (electron temperature) using Boltzmann plot have been estimated. All argon atomic line parameters have been taken from NIST atomic spectra database1. From the results we can observe similar electron temperature for 5 W and 50 W measurements, but slight increase of temperature in case of Ar-CPA mixture.

Název v anglickém jazyce

Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture

Popis výsledku anglicky

Optical emission spectroscopy is a technique for analysis of optical radiation from plasma source (or other light sources). In this contribution we are studying light emission from argon and argon cyclopropylamine (CPA) mixture in capacitively coupled plasma generated in plasma enhanced chemical vapor deposition reactor R4 at CEITEC Nano. Pressure inside of the reactor was 50 Pa (Ar flow 10 sccm and for mixture Ar flow 10 sccm and CPA flow 1 sccm) and power was set for 5 W and 50 W for both cases. Recording of spectra was done using Andor Shamrock SR-500i coupled with Newton 971 EMCCD spectroscopic detector. Measured spectral range was from 200 nm to 1000 nm. In all measured spectra we focused on detection and identification of Argon atomic lines. In Ar–CPA mixture we observe emission of molecular fragments as well. Plasma parameter (electron temperature) using Boltzmann plot have been estimated. All argon atomic line parameters have been taken from NIST atomic spectra database1. From the results we can observe similar electron temperature for 5 W and 50 W measurements, but slight increase of temperature in case of Ar-CPA mixture.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

10403 - Physical chemistry

Projekt

<a href="/cs/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů