Určení drsnosti povrchu a indexu lomu amorfních filmů As40S60 připravených metodou "spin coating"

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F04%3A00001377" target="_blank" >RIV/00216275:25310/04:00001377 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating

Popis výsledku v původním jazyce

An envelope method, based on the optical reection spectrum taken at normal incidence, has been successfully applied to the geometrical?optical characterization of thin dielectric lms having signicant surface roughness. Such a method allows the determination of the average thickness and the refractive index of the lms with accuracies better than 1%, as well as the average amplitude of the surface roughness with an accuracy of about 2%. Amorphous As40S60 thin lms have been deposited by spin coating, ontoglass substrates, from a solution of the bulk material in n-propylamine. Indications of the surface roughness in these lms were found from total (specular plus diuse) reectance measurements using an integrating sphere, and also from mechanical measurements using a stylus proler. The latter technique provided a value for the average surface roughness of 20 ? 4 nm, which is in excellent agreement with the optically determined value of 17.4? 0.4 nm.

Název v anglickém jazyce

Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating

Popis výsledku anglicky

An envelope method, based on the optical reection spectrum taken at normal incidence, has been successfully applied to the geometrical?optical characterization of thin dielectric lms having signicant surface roughness. Such a method allows the determination of the average thickness and the refractive index of the lms with accuracies better than 1%, as well as the average amplitude of the surface roughness with an accuracy of about 2%. Amorphous As40S60 thin lms have been deposited by spin coating, ontoglass substrates, from a solution of the bulk material in n-propylamine. Indications of the surface roughness in these lms were found from total (specular plus diuse) reectance measurements using an integrating sphere, and also from mechanical measurements using a stylus proler. The latter technique provided a value for the average surface roughness of 20 ? 4 nm, which is in excellent agreement with the optically determined value of 17.4? 0.4 nm.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

CA - Anorganická chemie

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optical Materials

ISSN

0925-3467

e-ISSN

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Svazek periodika

N

Číslo periodika v rámci svazku

27

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

8

Strana od-do

147-154

Kód UT WoS článku

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EID výsledku v databázi Scopus

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