Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F04%3A00001378" target="_blank" >RIV/00216275:25310/04:00001378 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition

Popis výsledku v původním jazyce

Amorphous chalcogenide lms of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin lms, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-proling stylus instrument, and dierences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD lms, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.

Název v anglickém jazyce

Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition

Popis výsledku anglicky

Amorphous chalcogenide lms of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin lms, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-proling stylus instrument, and dierences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD lms, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

CA - Anorganická chemie

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Non-Crystalline Solids

ISSN

0022-3093

e-ISSN

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Svazek periodika

N

Číslo periodika v rámci svazku

345&346

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

88-92

Kód UT WoS článku

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EID výsledku v databázi Scopus

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