Soft Imprint Lithography of a Bulk Chalcogenide Glass

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F12%3A39896002" target="_blank" >RIV/00216275:25310/12:39896002 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Soft Imprint Lithography of a Bulk Chalcogenide Glass

Popis výsledku v původním jazyce

Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 -10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenideglasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical p

Název v anglickém jazyce

Soft Imprint Lithography of a Bulk Chalcogenide Glass

Popis výsledku anglicky

Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 -10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenideglasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical p

Druh

O - Ostatní výsledky

CEP obor

CA - Anorganická chemie

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů