Nanoimprint lithography of chalcogenide glasses with PDMS stamps

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F12%3A39896012" target="_blank" >RIV/00216275:25310/12:39896012 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Nanoimprint lithography of chalcogenide glasses with PDMS stamps

Popis výsledku v původním jazyce

We prepared arrays of micrometer-sized features such as lines and lenses onto centimeter-square surface areas of chalcogenide As-S and As-Se bulk glasses by using nanoimprint lithography employing a soft PDMS stamp. A polymer stamp was obtained as a replica from lithographically patterned silicon master and then used for low load imprinting of glass surfaces heated near their softening points. We confirmed that patterning of high refractive index chalcogenide glasses gives a great promise in a facile fabrication of effective diffracting and focusing micro-optical elements and nanostructured surfaces such as anti-reflection surfaces, 2D-photonic crystals and for surface enhanced effects such as luminescence or chemical sensing in the near future.

Název v anglickém jazyce

Nanoimprint lithography of chalcogenide glasses with PDMS stamps

Popis výsledku anglicky

We prepared arrays of micrometer-sized features such as lines and lenses onto centimeter-square surface areas of chalcogenide As-S and As-Se bulk glasses by using nanoimprint lithography employing a soft PDMS stamp. A polymer stamp was obtained as a replica from lithographically patterned silicon master and then used for low load imprinting of glass surfaces heated near their softening points. We confirmed that patterning of high refractive index chalcogenide glasses gives a great promise in a facile fabrication of effective diffracting and focusing micro-optical elements and nanostructured surfaces such as anti-reflection surfaces, 2D-photonic crystals and for surface enhanced effects such as luminescence or chemical sensing in the near future.

Druh

O - Ostatní výsledky

CEP obor

CA - Anorganická chemie

OECD FORD obor

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Projekt

<a href="/cs/project/EE2.3.20.0254" target="_blank" >EE2.3.20.0254: Výzkumný tým pro pokročilé nekrystalické materiály</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů