Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26110%2F15%3APU112514" target="_blank" >RIV/00216305:26110/15:PU112514 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1088/0957-4484/26/6/065501" target="_blank" >http://dx.doi.org/10.1088/0957-4484/26/6/065501</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0957-4484/26/6/065501" target="_blank" >10.1088/0957-4484/26/6/065501</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

Popis výsledku v původním jazyce

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described.

Název v anglickém jazyce

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

Popis výsledku anglicky

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

NANOTECHNOLOGY

ISSN

0957-4484

e-ISSN

1361-6528

Svazek periodika

26

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000348448000012

EID výsledku v databázi Scopus

2-s2.0-84921632634