Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F03%3APU38835" target="_blank" >RIV/00216305:26220/03:PU38835 - isvavai.cz</a>

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Popis výsledku v původním jazyce

The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitivelayers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.

Název v anglickém jazyce

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Popis výsledku anglicky

The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitivelayers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.

Druh

D - Stať ve sborníku

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

—

Projekt

—

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute

ISBN

0-9733840-0

ISSN

—

e-ISSN

—

Počet stran výsledku

1

Strana od-do

291-291

Název nakladatele

—

Místo vydání

Povoa de Varzim, Portugalsko

Místo konání akce

Povoa de Varzim

Datum konání akce

1. 1. 2003

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

—