Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F03%3APU38696" target="_blank" >RIV/00216305:26220/03:PU38696 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Jazyk výsledku
angličtina
Název v původním jazyce
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
Popis výsledku v původním jazyce
Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.
Název v anglickém jazyce
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
Popis výsledku anglicky
Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.

Rok uplatnění
2003
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Podobné výsledky(10)