Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU93554" target="_blank" >RIV/00216305:26220/11:PU93554 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

Popis výsledku v původním jazyce

The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMSsensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on thearea and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too.

Název v anglickém jazyce

Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

Popis výsledku anglicky

The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMSsensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on thearea and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of 18th European microelectronics packaging conference EMPC 2011

ISBN

978-0-9568086-0-8

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

79-83

Název nakladatele

Neuveden

Místo vydání

Brighton

Místo konání akce

Brighton

Datum konání akce

12. 9. 2011

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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