Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU93801" target="_blank" >RIV/00216305:26220/11:PU93801 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

Popis výsledku v původním jazyce

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment,CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensorsthat are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means o

Název v anglickém jazyce

Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

Popis výsledku anglicky

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment,CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensorsthat are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means o

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

NANOCON 2011 - Conference Proceedings

ISBN

978-80-87294-23-9

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

491-495

Název nakladatele

Tanger Ltd.

Místo vydání

Ostrava

Místo konání akce

Brno

Datum konání akce

21. 9. 2011

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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