UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F18%3APU129265" target="_blank" >RIV/00216305:26220/18:PU129265 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS

Popis výsledku v původním jazyce

In the present time traditional piezoelectric accelerometers are mostly used in the industrial environment. Mechanical size and relatively higher price of the sensors can impede their mass application in the diagnostics of machines. In the past, MEMS sensors were inappropriate for small signals measurement due to their own, relatively high, output noise level. But the development of MEMS structures is improving. Main parameters, such as price, frequency range, dynamic range, but mainly ultralow noise density represent significant role in the potential mass usage of the MEMS accelerometers in the vibrodiagnostics field. Ultralow noise MEMS accelerometers manufactured by Analog Devices, Colibrys and Silicon Designs were selected and output noise was measured. Rough data from accelerometer were re-scaled and integrated from acceleration to velocity domain and filtered – from wide-band range to ISO range. Based on the results, comparison with traditional piezoelectric industrial accelerometers was done. The noise of measured MEMS accelerometers is from 0.0029 mm/s to 0.022 mm/s, which is comparable to the piezo sensors noise level. MEMS sensors are useful for measuring of themachines under the conditions defined in standard ISO 10816.

Název v anglickém jazyce

UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS

Popis výsledku anglicky

In the present time traditional piezoelectric accelerometers are mostly used in the industrial environment. Mechanical size and relatively higher price of the sensors can impede their mass application in the diagnostics of machines. In the past, MEMS sensors were inappropriate for small signals measurement due to their own, relatively high, output noise level. But the development of MEMS structures is improving. Main parameters, such as price, frequency range, dynamic range, but mainly ultralow noise density represent significant role in the potential mass usage of the MEMS accelerometers in the vibrodiagnostics field. Ultralow noise MEMS accelerometers manufactured by Analog Devices, Colibrys and Silicon Designs were selected and output noise was measured. Rough data from accelerometer were re-scaled and integrated from acceleration to velocity domain and filtered – from wide-band range to ISO range. Based on the results, comparison with traditional piezoelectric industrial accelerometers was done. The noise of measured MEMS accelerometers is from 0.0029 mm/s to 0.022 mm/s, which is comparable to the piezo sensors noise level. MEMS sensors are useful for measuring of themachines under the conditions defined in standard ISO 10816.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 25th International Congress on Sound and Vibration

ISBN

978-83-7880-552-6

ISSN

2329-3675

e-ISSN

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Počet stran výsledku

7

Strana od-do

1-7

Název nakladatele

Neuveden

Místo vydání

Hiroshima

Místo konání akce

Hiroshima

Datum konání akce

8. 7. 2018

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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