FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING

Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F19%3APU132343" target="_blank" >RIV/00216305:26220/19:PU132343 - isvavai.cz</a>
Výsledek na webu
<a href="https://www.upet.ro/annals/mechanical/pdf/2018/06_Hlavata.pdf" target="_blank" >https://www.upet.ro/annals/mechanical/pdf/2018/06_Hlavata.pdf</a>
DOI - Digital Object Identifier
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Jazyk výsledku
angličtina
Název v původním jazyce
FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING
Popis výsledku v původním jazyce
The paper deals with the effect of the critical flow, which is reached during pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The study compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. The problem was solved using the finite volume method by the Ansys Fluent system.
Název v anglickém jazyce
FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING
Popis výsledku anglicky
The paper deals with the effect of the critical flow, which is reached during pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The study compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. The problem was solved using the finite volume method by the Ansys Fluent system.

Rok uplatnění
2019
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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