Modelling of Magnetron TiN Deposition Using the Design of Experiment

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F21%3APU132633" target="_blank" >RIV/00216305:26220/21:PU132633 - isvavai.cz</a>

Výsledek na webu

<a href="https://link.springer.com/chapter/10.1007/978-3-030-61659-5_6" target="_blank" >https://link.springer.com/chapter/10.1007/978-3-030-61659-5_6</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/978-3-030-61659-5_6" target="_blank" >10.1007/978-3-030-61659-5_6</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Modelling of Magnetron TiN Deposition Using the Design of Experiment

Popis výsledku v původním jazyce

The aim of this study was to find the optimal settings of magnetron sputtering deposition of thin titanium nitride layers with respect to the size and hardness of the deposited layer. Direct sputtering deposition of the ceramic target using a radiofrequency source was used for magnetron sputtering deposition. The advantage of this method is easier finding of optimal deposition parameters. X-ray reflectometry was used to characterize the coating in terms of thickness. The hardness was determined by the Berkovich tip. To optimize the thickness and hardness of the TiN coating, a rotatable central composite design of response area for pressure and performance was used. Using only statistically significant fac-tors, mathematical models of thickness and hardness of TiN coating were con-structed. Based on these mathematical models, the optimal settings of statistically significant TiN magnetron deposition factors were found.

Název v anglickém jazyce

Modelling of Magnetron TiN Deposition Using the Design of Experiment

Popis výsledku anglicky

The aim of this study was to find the optimal settings of magnetron sputtering deposition of thin titanium nitride layers with respect to the size and hardness of the deposited layer. Direct sputtering deposition of the ceramic target using a radiofrequency source was used for magnetron sputtering deposition. The advantage of this method is easier finding of optimal deposition parameters. X-ray reflectometry was used to characterize the coating in terms of thickness. The hardness was determined by the Berkovich tip. To optimize the thickness and hardness of the TiN coating, a rotatable central composite design of response area for pressure and performance was used. Using only statistically significant fac-tors, mathematical models of thickness and hardness of TiN coating were con-structed. Based on these mathematical models, the optimal settings of statistically significant TiN magnetron deposition factors were found.

Druh

C - Kapitola v odborné knize

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Recent Advances in Soft Computing and Cybernetics

ISBN

978-3-030-61659-5

Počet stran výsledku

8

Strana od-do

63-70

Počet stran knihy

320

Název nakladatele

Springer

Místo vydání

Švýcarsko

Kód UT WoS kapitoly

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