Novel method of reactive magnetron sputtering process control

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F13%3A00066349" target="_blank" >RIV/00216224:14310/13:00066349 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Novel method of reactive magnetron sputtering process control

Popis výsledku v původním jazyce

Novel method of control of reactive magnetron sputtering process is presented. To control reactive magnetron sputtering process the process pressure is regulated by the flow of the reactive gas (nitrogen). Oscillations of the flow of the reactive gas aredetermined and used as feedback to find the right overall pressure, where stoichiometric coating is deposited. To see typical process behavior, see fig. 1. Proposed method of control was used for deposition of several coatings (TiN, AlTiN, AlCrN, CrTiN)on industrial scale central rotating unbalanced magnetron. To achieve superior adhesion of these layers, novel cleaning method called LGD was used. These coatings were used in industrial applications. Applications results in comparison with market standard coatings will be presented along with other measurements of deposited layers (EDX, SIMS, SEM).

Název v anglickém jazyce

Novel method of reactive magnetron sputtering process control

Popis výsledku anglicky

Novel method of control of reactive magnetron sputtering process is presented. To control reactive magnetron sputtering process the process pressure is regulated by the flow of the reactive gas (nitrogen). Oscillations of the flow of the reactive gas aredetermined and used as feedback to find the right overall pressure, where stoichiometric coating is deposited. To see typical process behavior, see fig. 1. Proposed method of control was used for deposition of several coatings (TiN, AlTiN, AlCrN, CrTiN)on industrial scale central rotating unbalanced magnetron. To achieve superior adhesion of these layers, novel cleaning method called LGD was used. These coatings were used in industrial applications. Applications results in comparison with market standard coatings will be presented along with other measurements of deposited layers (EDX, SIMS, SEM).

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů