Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F21%3APU142843" target="_blank" >RIV/00216305:26220/21:PU142843 - isvavai.cz</a>

Výsledek na webu

<a href="https://link.springer.com/article/10.1007/s10762-021-00781-y" target="_blank" >https://link.springer.com/article/10.1007/s10762-021-00781-y</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s10762-021-00781-y" target="_blank" >10.1007/s10762-021-00781-y</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

Popis výsledku v původním jazyce

In this contribution, we describe the design, technology, and physical parameters of antenna-coupled microbolometer, used for broadband detection of terahertz electromagnetic spectrum. This microbolometer features an application of La0.67Sr0.33MnO3 layer grown on multilayered material stack ensuring lattice matching of the sensing LSMO layer to silicon. By virtue of bulk micromachining of silicon-on-insulator substrates, the sensing structure is built on thin suspended membrane to provide weak thermal link, increasing thermal response, thus sensitivity. Additionally, it helps suppressing excitation of in-plane guided surface modes that will otherwise deteriorate the antenna radiation diagram and affect the spectral responsivity of the sensor. Finally, the operation of sensor is demonstrated using a molecular laser setup at 762 GHz (and also 1.4 THz) emission line. The parameters of the said microbolometers are analyzed in terms of response and time constant. Optimal working temperature of the detectors is about 65 degrees C.

Název v anglickém jazyce

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

Popis výsledku anglicky

In this contribution, we describe the design, technology, and physical parameters of antenna-coupled microbolometer, used for broadband detection of terahertz electromagnetic spectrum. This microbolometer features an application of La0.67Sr0.33MnO3 layer grown on multilayered material stack ensuring lattice matching of the sensing LSMO layer to silicon. By virtue of bulk micromachining of silicon-on-insulator substrates, the sensing structure is built on thin suspended membrane to provide weak thermal link, increasing thermal response, thus sensitivity. Additionally, it helps suppressing excitation of in-plane guided surface modes that will otherwise deteriorate the antenna radiation diagram and affect the spectral responsivity of the sensor. Finally, the operation of sensor is demonstrated using a molecular laser setup at 762 GHz (and also 1.4 THz) emission line. The parameters of the said microbolometers are analyzed in terms of response and time constant. Optimal working temperature of the detectors is about 65 degrees C.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20202 - Communication engineering and systems

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of infrared, millimeter and terahertz waves

ISSN

1866-6892

e-ISSN

1866-6906

Svazek periodika

42

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

17

Strana od-do

462-478

Kód UT WoS článku

000627202800001

EID výsledku v databázi Scopus

2-s2.0-85102457299