Nanocomposite thin films synthesized by plasma nanotechnology

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F11%3APU96925" target="_blank" >RIV/00216305:26310/11:PU96925 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Nanocomposite thin films synthesized by plasma nanotechnology

Popis výsledku v původním jazyce

Thin amorphous films with incorporated grains of different mechanical properties can be synthesized simultaneously from tetravinylsilane monomer using plasma-enhanced chemical vapor deposition (PECVD). Thin films in a form of hydrogenated amorphous carbon-silicon (a-SiC:H) alloy of thickness from 25 nm to 1 micron were deposited at an RF power ranging from 10 to 70 W (self-bias 120-680 V) and a mass flow rate of 3.8 sccm (3.0 Pa). The films synthesized at a power of 10 W (120 V) were of grain structurewith a diameter of grains about 29 nm. The diameter of some grains increased up to 0.5 micron with enhanced power at an expense of smaller ones, whose magnitude decreased. The bigger grains formed isolated islands in a relatively smooth matrix at a powerof 50 W (530 V) and the density of bigger grains increased forming agglomerates at a power of 70 W (680 V). The grain structure of all the films was extensively investigated by atomic force microscopy (AFM) using height, magnitude, phase

Název v anglickém jazyce

Nanocomposite thin films synthesized by plasma nanotechnology

Popis výsledku anglicky

Thin amorphous films with incorporated grains of different mechanical properties can be synthesized simultaneously from tetravinylsilane monomer using plasma-enhanced chemical vapor deposition (PECVD). Thin films in a form of hydrogenated amorphous carbon-silicon (a-SiC:H) alloy of thickness from 25 nm to 1 micron were deposited at an RF power ranging from 10 to 70 W (self-bias 120-680 V) and a mass flow rate of 3.8 sccm (3.0 Pa). The films synthesized at a power of 10 W (120 V) were of grain structurewith a diameter of grains about 29 nm. The diameter of some grains increased up to 0.5 micron with enhanced power at an expense of smaller ones, whose magnitude decreased. The bigger grains formed isolated islands in a relatively smooth matrix at a powerof 50 W (530 V) and the density of bigger grains increased forming agglomerates at a power of 70 W (680 V). The grain structure of all the films was extensively investigated by atomic force microscopy (AFM) using height, magnitude, phase

Druh

O - Ostatní výsledky

CEP obor

CF - Fyzikální chemie a teoretická chemie

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů