Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F17%3APU124875" target="_blank" >RIV/00216305:26310/17:PU124875 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry

Popis výsledku v původním jazyce

We prepared thin films from vapor of tetravinylsilane (TVS) monomer using plasma-enhanced chemical vapor deposition (PECVD) with a process gas pressure of 2.7 Pa at a monomer flow rate of 3.8 sccm. Thin films were deposited at different powers using continuous wave (10-70 W) and pulsed (2-150 W) plasmas (13.56 MHz). In situ phase-modulated spectroscopic ellipsometer (UVISEL, Jobin-Yvon) operated in range 250-830 nm was used to determine the film thickness and optical properties like refractive index and extinction coefficient in a form of dispersion curves. For a selected wavelength of 633 nm, the refractive index increased from 1.7 to 2.3 and the extinction coefficient was ranging from 0 to 0.15 with enhanced power. The dielectric function of films evaluated by spectroscopic ellipsometry was fitted by Tauc-Lorentz formula to determine the band gap, which decreased from 2.7 eV (2 W) to 0.7 eV (150 W) with enhanced power. The optical properties of films dependent on the power were similar for continuou

Název v anglickém jazyce

Thin Films of Tetravinylsilane Characterized by Spectroscopic Ellipsometry

Popis výsledku anglicky

We prepared thin films from vapor of tetravinylsilane (TVS) monomer using plasma-enhanced chemical vapor deposition (PECVD) with a process gas pressure of 2.7 Pa at a monomer flow rate of 3.8 sccm. Thin films were deposited at different powers using continuous wave (10-70 W) and pulsed (2-150 W) plasmas (13.56 MHz). In situ phase-modulated spectroscopic ellipsometer (UVISEL, Jobin-Yvon) operated in range 250-830 nm was used to determine the film thickness and optical properties like refractive index and extinction coefficient in a form of dispersion curves. For a selected wavelength of 633 nm, the refractive index increased from 1.7 to 2.3 and the extinction coefficient was ranging from 0 to 0.15 with enhanced power. The dielectric function of films evaluated by spectroscopic ellipsometry was fitted by Tauc-Lorentz formula to determine the band gap, which decreased from 2.7 eV (2 W) to 0.7 eV (150 W) with enhanced power. The optical properties of films dependent on the power were similar for continuou

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/GA16-09161S" target="_blank" >GA16-09161S: Syntéza multifunkčních plazmových polymerů pro polymerní kompozity bez rozhraní</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů