Design and Fabrication of Fully Implantable MEMS Cochlea

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU111570" target="_blank" >RIV/00216305:26620/14:PU111570 - isvavai.cz</a>

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Design and Fabrication of Fully Implantable MEMS Cochlea

Popis výsledku v původním jazyce

The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanicalproperties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The soundis detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.

Název v anglickém jazyce

Design and Fabrication of Fully Implantable MEMS Cochlea

Popis výsledku anglicky

The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanicalproperties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The soundis detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.

Druh

O - Ostatní výsledky

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

—

Projekt

<a href="/cs/project/GA13-18219S" target="_blank" >GA13-18219S: Výzkum umělé mikroelektromechanické kochley založené na bance mechanických filtrů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů