Gas sensor based on MEMS cantilever resonator

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F15%3APU113944" target="_blank" >RIV/00216305:26620/15:PU113944 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Gas sensor based on MEMS cantilever resonator

Popis výsledku v původním jazyce

The aim of this work is about fabrication of MEMS gas sensor based on resonance cantilever beam. Cantilever will exploit piezoelectric effect; frequency of oscillation is measured with change of load of cantilever. Loading of cantilever is dependent on molecules bind on active layer which could be realized by using polymers, carbon nanotubes, etc. Sensor will be created as sandwich structure with silicon oxide passivation layer. Bottom electrode will be made from titanium. It is very important to reachrequired crystallographic structure of piezoelectric aluminum nitride layer with c-axis orientation which is in the middle of electrodes. This crystallographic structure is affected by crystallographic structure of titanium layer. Top electrode will be fabricated from gold. Width of cantilever beam will be in range from 50 ?m to 200 ?m and length will be in range from 100 ?m to 800 ?m with thickness about 2.5 ?m. These dimensions will be optimized to find ideal resonance of cantilever. M

Název v anglickém jazyce

Gas sensor based on MEMS cantilever resonator

Popis výsledku anglicky

The aim of this work is about fabrication of MEMS gas sensor based on resonance cantilever beam. Cantilever will exploit piezoelectric effect; frequency of oscillation is measured with change of load of cantilever. Loading of cantilever is dependent on molecules bind on active layer which could be realized by using polymers, carbon nanotubes, etc. Sensor will be created as sandwich structure with silicon oxide passivation layer. Bottom electrode will be made from titanium. It is very important to reachrequired crystallographic structure of piezoelectric aluminum nitride layer with c-axis orientation which is in the middle of electrodes. This crystallographic structure is affected by crystallographic structure of titanium layer. Top electrode will be fabricated from gold. Width of cantilever beam will be in range from 50 ?m to 200 ?m and length will be in range from 100 ?m to 800 ?m with thickness about 2.5 ?m. These dimensions will be optimized to find ideal resonance of cantilever. M

Druh

O - Ostatní výsledky

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů