Real-time observation of self-limiting SiO2/Si decomposition catalysed by gold silicide droplets

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F15%3APU116557" target="_blank" >RIV/00216305:26620/15:PU116557 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1039/c5ra19472e" target="_blank" >http://dx.doi.org/10.1039/c5ra19472e</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1039/c5ra19472e" target="_blank" >10.1039/c5ra19472e</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Real-time observation of self-limiting SiO2/Si decomposition catalysed by gold silicide droplets

Popis výsledku v původním jazyce

The thermal decomposition of thin SiO2 layers on silicon substrates draws significant attention due to its high technological importance in the semiconductor industry and in all relevant fields where silicon is employed as a substrate or part of an active device. Understanding of the underlying processes on silicon surfaces is therefore of fundamental importance. Here we show that the presence of gold silicide (AuSi) catalytically enhances the decomposition of SiO2 layers on a Si substrate, which proceeds via void nucleation under the positions of Au nanoparticles and subsequent lateral growth of the void. Our realtime secondary electron microscopy data reveal that the presence of a AuSi droplet within the void enhances the reaction rate due to an increased pre-exponential factor of the rate limiting step (i.e., SiO desorption at temperatures beyond 700 C). While the SiO2 is decomposed the silicon surface in the open voids is covered by an Au monolayer. Consequently, as the void grows, the AuSi droplet is depleted of gold and the reaction rate enhancement is terminated when the supply of gold stops. Hence, the size of the pits is determined by the initial size of the Au nanoparticle. Our work thus provides insight into Au-enhanced SiO2 decomposition and its self-limiting nature offers a way for the preparation of nanoscale features with nanometer precision.

Název v anglickém jazyce

Real-time observation of self-limiting SiO2/Si decomposition catalysed by gold silicide droplets

Popis výsledku anglicky

The thermal decomposition of thin SiO2 layers on silicon substrates draws significant attention due to its high technological importance in the semiconductor industry and in all relevant fields where silicon is employed as a substrate or part of an active device. Understanding of the underlying processes on silicon surfaces is therefore of fundamental importance. Here we show that the presence of gold silicide (AuSi) catalytically enhances the decomposition of SiO2 layers on a Si substrate, which proceeds via void nucleation under the positions of Au nanoparticles and subsequent lateral growth of the void. Our realtime secondary electron microscopy data reveal that the presence of a AuSi droplet within the void enhances the reaction rate due to an increased pre-exponential factor of the rate limiting step (i.e., SiO desorption at temperatures beyond 700 C). While the SiO2 is decomposed the silicon surface in the open voids is covered by an Au monolayer. Consequently, as the void grows, the AuSi droplet is depleted of gold and the reaction rate enhancement is terminated when the supply of gold stops. Hence, the size of the pits is determined by the initial size of the Au nanoparticle. Our work thus provides insight into Au-enhanced SiO2 decomposition and its self-limiting nature offers a way for the preparation of nanoscale features with nanometer precision.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

RSC Advances

ISSN

2046-2069

e-ISSN

—

Svazek periodika

5

Číslo periodika v rámci svazku

123

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

6

Strana od-do

101726-101731

Kód UT WoS článku

000365952200061

EID výsledku v databázi Scopus

2-s2.0-84948659558