Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU144218" target="_blank" >RIV/00216305:26620/19:PU144218 - isvavai.cz</a>

Výsledek na webu

<a href="https://linkinghub.elsevier.com/retrieve/pii/S0008622318312284" target="_blank" >https://linkinghub.elsevier.com/retrieve/pii/S0008622318312284</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.carbon.2018.12.093" target="_blank" >10.1016/j.carbon.2018.12.093</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Popis výsledku v původním jazyce

Thin diamond films deposited by chemical vapour deposition (CVD) usually feature cross-sectional gradients of microstructure, residual stress and mechanical properties, which decisively influence their functional properties. This work introduces a novel correlative cross-sectional nano-analytics approach, which is applied to a multi-layered CVD diamond film grown using microwave plasma-enhanced CVD and consisting of a similar to 8 mu m thick nanocrystalline (NCD) base and a similar to 14.5 mu m thick poly-crystalline (PCD) top diamond sublayers. Complementary cross-sectional 30 nm beam synchrotron X-ray diffraction, depth-resolved micro-cantilever and hardness testing and electron microscopy analyses reveal correlations between microstructure, residual stress and mechanical properties. The NCD sublayer exhibits a 1.5 mu m thick isotropic nucleation region with the highest stresses of similar to 1.3 GPa and defect-rich nanocrystallites. With increasing sublayer thickness, a < 110 > fibre texture evolves gradually, accompanied by an increase in crystallite size and a decrease in stress. At the NCD/PCD sublayer interface, texture, stresses and crystallite size change abruptly and the PCD sublayer exhibits the presence of Zone T competitive grain growth microstructure. NCD and PCD sublayers differ in fracture stresses of similar to 14 and similar to 31 GPa, respectively, as well as in elastic moduli and hardness, which are correlated with their particular microstructures. In summary, the introduced nano-analytics approach provides complex correlations between microstructure, stresses, functional properties and deposition conditions. (C) 2018 Elsevier Ltd. All rights reserved.

Název v anglickém jazyce

Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Popis výsledku anglicky

Thin diamond films deposited by chemical vapour deposition (CVD) usually feature cross-sectional gradients of microstructure, residual stress and mechanical properties, which decisively influence their functional properties. This work introduces a novel correlative cross-sectional nano-analytics approach, which is applied to a multi-layered CVD diamond film grown using microwave plasma-enhanced CVD and consisting of a similar to 8 mu m thick nanocrystalline (NCD) base and a similar to 14.5 mu m thick poly-crystalline (PCD) top diamond sublayers. Complementary cross-sectional 30 nm beam synchrotron X-ray diffraction, depth-resolved micro-cantilever and hardness testing and electron microscopy analyses reveal correlations between microstructure, residual stress and mechanical properties. The NCD sublayer exhibits a 1.5 mu m thick isotropic nucleation region with the highest stresses of similar to 1.3 GPa and defect-rich nanocrystallites. With increasing sublayer thickness, a < 110 > fibre texture evolves gradually, accompanied by an increase in crystallite size and a decrease in stress. At the NCD/PCD sublayer interface, texture, stresses and crystallite size change abruptly and the PCD sublayer exhibits the presence of Zone T competitive grain growth microstructure. NCD and PCD sublayers differ in fracture stresses of similar to 14 and similar to 31 GPa, respectively, as well as in elastic moduli and hardness, which are correlated with their particular microstructures. In summary, the introduced nano-analytics approach provides complex correlations between microstructure, stresses, functional properties and deposition conditions. (C) 2018 Elsevier Ltd. All rights reserved.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

10403 - Physical chemistry

Projekt

—

Návaznosti

—

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

CARBON

ISSN

0008-6223

e-ISSN

1873-3891

Svazek periodika

144

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

666-674

Kód UT WoS článku

000459991900074

EID výsledku v databázi Scopus

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