A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F20%3APU137560" target="_blank" >RIV/00216305:26620/20:PU137560 - isvavai.cz</a>

Výsledek na webu

<a href="https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY" target="_blank" >https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/JMEMS.2020.3008867" target="_blank" >10.1109/JMEMS.2020.3008867</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

Popis výsledku v původním jazyce

A dual-channel flow-through microcalorimeter device is presented along with a non-contact precision method of temperature calibration. A microfluidic channel with a volume of approximate to 550 pL in a spiral layout was fabricated from low-stress nitride suspended over a cavity in a silicon substrate. The thin-film heater and resistive temperature detector (RTD) on the channel were defined by a patterned Ti layer. The device exhibited a rapid thermal response with the following thermal characteristics: a time constant of approximate to 10.5 ms, a heat conductance of approximate to 152 mu W. K-1 and a heat capacitance of approximate to 1.6 mu J . K-1 on average based on the measurements of nine separate units fabricated on the same wafer. Further, the melting curve analysis (MCA) of a double-stranded DNA was proposed as a non-contact method of microcalorimeter RTD calibration. The method revealed that the measurement by the RTD underestimates the temperature of the channel interior by an amount of nearly 15%, at approximate to 9 mW. At this dissipated power level, the method also revealed a spatial nonuniformity of approximate to +/- 0.8 degrees C across the microcalorimeter. [2020-0173]

Název v anglickém jazyce

A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

Popis výsledku anglicky

A dual-channel flow-through microcalorimeter device is presented along with a non-contact precision method of temperature calibration. A microfluidic channel with a volume of approximate to 550 pL in a spiral layout was fabricated from low-stress nitride suspended over a cavity in a silicon substrate. The thin-film heater and resistive temperature detector (RTD) on the channel were defined by a patterned Ti layer. The device exhibited a rapid thermal response with the following thermal characteristics: a time constant of approximate to 10.5 ms, a heat conductance of approximate to 152 mu W. K-1 and a heat capacitance of approximate to 1.6 mu J . K-1 on average based on the measurements of nine separate units fabricated on the same wafer. Further, the melting curve analysis (MCA) of a double-stranded DNA was proposed as a non-contact method of microcalorimeter RTD calibration. The method revealed that the measurement by the RTD underestimates the temperature of the channel interior by an amount of nearly 15%, at approximate to 9 mW. At this dissipated power level, the method also revealed a spatial nonuniformity of approximate to +/- 0.8 degrees C across the microcalorimeter. [2020-0173]

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

20303 - Thermodynamics

Projekt

<a href="/cs/project/GA17-20716S" target="_blank" >GA17-20716S: Vysoce přesné mapování vnitřní teploty a energetická balance živých buněk</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

ISSN

1057-7157

e-ISSN

1941-0158

Svazek periodika

29

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

3

Strana od-do

1103-1105

Kód UT WoS článku

000576466500079

EID výsledku v databázi Scopus

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