Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1-xN Coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU142255" target="_blank" >RIV/00216305:26620/21:PU142255 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/2079-6412/11/4/416" target="_blank" >https://www.mdpi.com/2079-6412/11/4/416</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/coatings11040416" target="_blank" >10.3390/coatings11040416</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1-xN Coatings

Popis výsledku v původním jazyce

The correlation between structural properties of Al-rich self-assembled nano-lamellar AlxTi1-xN coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient AlxTi1-xN coatings were prepared by a stepwise increase in temperature and pressure in the ranges of 750-860 degrees C and 1.56 to 4.5 kPa during the depositions at a constant composition of the process gas mixture. The cross-sectional properties of the coatings were analyzed using X-ray nanodiffraction (CSnanoXRD) and electron microscopy. Experimental results indicate that the variation of the process parameters results in changes in microstructure, grain morphology, elastic strain, nanolamellae's chemistry and bi-layer period. At temperatures of similar to 750-800 degrees C and pressures of 2.5-4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with the build-up of tensile stresses, which become relaxed in coating regions filled with nanocrystalline grains. CSnanoXRD superlattice satellite reflections indicate the period of the cubic Al(Ti)N-Ti(Al)N bilayers, which changes from 6.7 to 9 nm due to the temperature increase from 750 to similar to 810 degrees C, while it remains nearly unaffected by the pressure variation. In summary, our study documents that CVD process parameters can be used to tune microstructural properties of self-assembled AlxTi1-xN nanolamellae as well as the coatings' grain morphology.

Název v anglickém jazyce

Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1-xN Coatings

Popis výsledku anglicky

The correlation between structural properties of Al-rich self-assembled nano-lamellar AlxTi1-xN coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient AlxTi1-xN coatings were prepared by a stepwise increase in temperature and pressure in the ranges of 750-860 degrees C and 1.56 to 4.5 kPa during the depositions at a constant composition of the process gas mixture. The cross-sectional properties of the coatings were analyzed using X-ray nanodiffraction (CSnanoXRD) and electron microscopy. Experimental results indicate that the variation of the process parameters results in changes in microstructure, grain morphology, elastic strain, nanolamellae's chemistry and bi-layer period. At temperatures of similar to 750-800 degrees C and pressures of 2.5-4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with the build-up of tensile stresses, which become relaxed in coating regions filled with nanocrystalline grains. CSnanoXRD superlattice satellite reflections indicate the period of the cubic Al(Ti)N-Ti(Al)N bilayers, which changes from 6.7 to 9 nm due to the temperature increase from 750 to similar to 810 degrees C, while it remains nearly unaffected by the pressure variation. In summary, our study documents that CVD process parameters can be used to tune microstructural properties of self-assembled AlxTi1-xN nanolamellae as well as the coatings' grain morphology.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/LM2018110" target="_blank" >LM2018110: Výzkumná infrastruktura CzechNanoLab</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Coatings, MDPI

ISSN

2079-6412

e-ISSN

—

Svazek periodika

11

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

15

Strana od-do

„416-1“-„416-15“

Kód UT WoS článku

000642933300001

EID výsledku v databázi Scopus

2-s2.0-85104189445