Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00108790" target="_blank" >RIV/00216224:14310/17:00108790 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S1359645417302914" target="_blank" >https://www.sciencedirect.com/science/article/pii/S1359645417302914</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.actamat.2017.04.009" target="_blank" >10.1016/j.actamat.2017.04.009</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess

Popis výsledku v původním jazyce

Synthesis of self-assembled thin films with multi -layered microstructures and outstanding functional properties represents a challenging task. In this work, detailed microstructural and chemical analyses of a self -assembled similar to 3.8 tm thick cubic (c) (AlxTi1-x)(y)N1-y film grown by low pressure chemical vapour deposition on a Al2O3(0001) substrate is discussed. The film with an overall x fraction of similar to 0.8 consists of alternating non-stoichiometric cubic Al-rich and Ti-rich nanolamellae with thicknesses of similar to 11 and similar to 1.5 nm. X-ray diffraction, electron microscopy and electron energy loss spectroscopy indicate that the nanolamellae coherency is primarily a result of an N deficiency in Ti-rich nanolamellae and an N excess in nanolamellae, which induce a decrease and an increase in nanolamellae lattice parameters, compared to the lattice parameters of stoichiometric rock-salt c-TiN and c-AIN, respectively. Therefore the self-assembly allows a formation of c-(AlxTi1-x)(y)N1-y nanolamellae with Al atomic fraction x of 0.9 -1.0, which are stabilized by neighbouring Ti-rich nanolamellae as a result of cube-on-cube epitaxy. The effect of the lattice parameter self-adjustment in the coherent nanolamellae by element deficiency and excess is verified by ab initio calculations. The compositional and morphological matches of the nano lamellae interfaces at the grain boundaries, the terraced growth with tetrahedral surface morphology and unzipped facets as well as the uniform nanolamellae thickness across the film depth indicate that the nanolamellae are formed as a result of kinetically-controlled oscillating reactions during the film growth. The understanding of this fascinating self -assembled nanolamellar microstructure containing a metastable c-AlNy, which does not exist in a bulk form at ambient conditions, represents a milestone in thin film technology. (C) 2017 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Název v anglickém jazyce

Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess

Popis výsledku anglicky

Synthesis of self-assembled thin films with multi -layered microstructures and outstanding functional properties represents a challenging task. In this work, detailed microstructural and chemical analyses of a self -assembled similar to 3.8 tm thick cubic (c) (AlxTi1-x)(y)N1-y film grown by low pressure chemical vapour deposition on a Al2O3(0001) substrate is discussed. The film with an overall x fraction of similar to 0.8 consists of alternating non-stoichiometric cubic Al-rich and Ti-rich nanolamellae with thicknesses of similar to 11 and similar to 1.5 nm. X-ray diffraction, electron microscopy and electron energy loss spectroscopy indicate that the nanolamellae coherency is primarily a result of an N deficiency in Ti-rich nanolamellae and an N excess in nanolamellae, which induce a decrease and an increase in nanolamellae lattice parameters, compared to the lattice parameters of stoichiometric rock-salt c-TiN and c-AIN, respectively. Therefore the self-assembly allows a formation of c-(AlxTi1-x)(y)N1-y nanolamellae with Al atomic fraction x of 0.9 -1.0, which are stabilized by neighbouring Ti-rich nanolamellae as a result of cube-on-cube epitaxy. The effect of the lattice parameter self-adjustment in the coherent nanolamellae by element deficiency and excess is verified by ab initio calculations. The compositional and morphological matches of the nano lamellae interfaces at the grain boundaries, the terraced growth with tetrahedral surface morphology and unzipped facets as well as the uniform nanolamellae thickness across the film depth indicate that the nanolamellae are formed as a result of kinetically-controlled oscillating reactions during the film growth. The understanding of this fascinating self -assembled nanolamellar microstructure containing a metastable c-AlNy, which does not exist in a bulk form at ambient conditions, represents a milestone in thin film technology. (C) 2017 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

ACTA MATERIALIA

ISSN

1359-6454

e-ISSN

—

Svazek periodika

131

Číslo periodika v rámci svazku

JUN

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

9

Strana od-do

391-399

Kód UT WoS článku

000402343400036

EID výsledku v databázi Scopus

2-s2.0-85017499286