Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F23%3APU148507" target="_blank" >RIV/00216305:26620/23:PU148507 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0030402623002711?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0030402623002711?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ijleo.2023.170775" target="_blank" >10.1016/j.ijleo.2023.170775</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

Popis výsledku v původním jazyce

Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle spectroscopic ellipsometry. For each sample, the experimental optical data are processed simultaneously to determine the power spectral density functions, which are modeled by exponentials of quadratic splines. The thicknesses of native oxide layers are also determined. The influence of roughness on the reflectance and ellipsometry is described by the combination of the scalar diffraction theory, which is used for the part of roughness with low spatial frequencies, and the Rayleigh-Rice theory, which is used for the part of roughness with high and moderate spatial frequencies. The separation of the roughness into the parts with low and high/moderate spatial frequencies is performed using a bound dependent on the wavelength of the incident light. The PSDFs determined by the optical method are compared with the PSDFs determined by processing the AFM scans.

Název v anglickém jazyce

Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

Popis výsledku anglicky

Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle spectroscopic ellipsometry. For each sample, the experimental optical data are processed simultaneously to determine the power spectral density functions, which are modeled by exponentials of quadratic splines. The thicknesses of native oxide layers are also determined. The influence of roughness on the reflectance and ellipsometry is described by the combination of the scalar diffraction theory, which is used for the part of roughness with low spatial frequencies, and the Rayleigh-Rice theory, which is used for the part of roughness with high and moderate spatial frequencies. The separation of the roughness into the parts with low and high/moderate spatial frequencies is performed using a bound dependent on the wavelength of the incident light. The PSDFs determined by the optical method are compared with the PSDFs determined by processing the AFM scans.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/FV40328" target="_blank" >FV40328: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optik

ISSN

1618-1336

e-ISSN

—

Svazek periodika

280

Číslo periodika v rámci svazku

170775

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

13

Strana od-do

„“-„“

Kód UT WoS článku

000967355200001

EID výsledku v databázi Scopus

2-s2.0-85150452381