Synthesis of Aligned Carbon Nanotubes by dc Plasma-Enhanced Hot Filament CVD.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F03%3A24210140" target="_blank" >RIV/46747885:24210/03:24210140 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/60076658:12410/03:00004618

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Synthesis of Aligned Carbon Nanotubes by dc Plasma-Enhanced Hot Filament CVD.

Popis výsledku v původním jazyce

Vertically aligned carbon nanotubes (CNTs) films have been prepared by a direct current plasma-enhanced hot filament chemical vapour deposition method. The growth of multi-walled carbon nanotubes on metal (Fe, Co, Ni) precoated silicon substrate are studed between 500 and 1000degreesC using gas mixtures of methane, hydrogen and argon. The influence of substrate pre-treatment, substrate voltage and deposition temperature on the structure and the alignment of the CNTs are discussed. In dependence on thickess of the thin metal layers, thermal pre-treatment or hydrogen plasma etching and plasma parameters during the deposition process different carbon nanostructures, especially regarding tube diameter, morphology and arrangement could be proved. Transmissin electron microscopy images of isolated tubes showed an imperfectly trained tubular structure of graphite shells, formed as 'bamboo'-like shapes with partly crystalline metal droplets on the tip. Because the alignment of the tubes is ind

Název v anglickém jazyce

Synthesis of Aligned Carbon Nanotubes by dc Plasma-Enhanced Hot Filament CVD.

Popis výsledku anglicky

Vertically aligned carbon nanotubes (CNTs) films have been prepared by a direct current plasma-enhanced hot filament chemical vapour deposition method. The growth of multi-walled carbon nanotubes on metal (Fe, Co, Ni) precoated silicon substrate are studed between 500 and 1000degreesC using gas mixtures of methane, hydrogen and argon. The influence of substrate pre-treatment, substrate voltage and deposition temperature on the structure and the alignment of the CNTs are discussed. In dependence on thickess of the thin metal layers, thermal pre-treatment or hydrogen plasma etching and plasma parameters during the deposition process different carbon nanostructures, especially regarding tube diameter, morphology and arrangement could be proved. Transmissin electron microscopy images of isolated tubes showed an imperfectly trained tubular structure of graphite shells, formed as 'bamboo'-like shapes with partly crystalline metal droplets on the tip. Because the alignment of the tubes is ind

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface & Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

Neuveden

Číslo periodika v rámci svazku

2003

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

7

Strana od-do

81-87

Kód UT WoS článku

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EID výsledku v databázi Scopus

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