The influence of positive pulses on HiPIMS deposition of hard DLC coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F19%3A43953497" target="_blank" >RIV/49777513:23520/19:43953497 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2018.11.001" target="_blank" >https://doi.org/10.1016/j.surfcoat.2018.11.001</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2018.11.001" target="_blank" >10.1016/j.surfcoat.2018.11.001</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The influence of positive pulses on HiPIMS deposition of hard DLC coatings

Popis výsledku v původním jazyce

Diamond-like Carbon (DLC) coatings were deposited by a novel HiPIMS method that incorporates positive voltage pulses at the end of the conventional HiPIMS discharge. Different positive voltage amplitudes were used to evaluate the effect of this operation mode on the discharge process and the mechanical properties of the deposited DLC coatings. The application of positive pulses was observed to enhance the ionization of both the sputtered carbon and argon species. Mass spectroscopy measurements showed that a larger amount of high-energy C+ ions are generated, with ion energies proportional to the amplitude of the overshoot voltage. The ion bombardment induced by the positive pulses led to higher compressive residual stresses and densification of deposited DLC coatings.

Název v anglickém jazyce

The influence of positive pulses on HiPIMS deposition of hard DLC coatings

Popis výsledku anglicky

Diamond-like Carbon (DLC) coatings were deposited by a novel HiPIMS method that incorporates positive voltage pulses at the end of the conventional HiPIMS discharge. Different positive voltage amplitudes were used to evaluate the effect of this operation mode on the discharge process and the mechanical properties of the deposited DLC coatings. The application of positive pulses was observed to enhance the ionization of both the sputtered carbon and argon species. Mass spectroscopy measurements showed that a larger amount of high-energy C+ ions are generated, with ion energies proportional to the amplitude of the overshoot voltage. The ion bombardment induced by the positive pulses led to higher compressive residual stresses and densification of deposited DLC coatings.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/LO1506" target="_blank" >LO1506: Podpora udržitelnosti centra NTIS - Nové technologie pro informační společnost</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

358

Číslo periodika v rámci svazku

25 JAN 2019

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

7

Strana od-do

43-49

Kód UT WoS článku

000456762300005

EID výsledku v databázi Scopus

2-s2.0-85056485259