Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00534021" target="_blank" >RIV/68378271:_____/20:00534021 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/49777513:23520/20:43958722

Výsledek na webu

<a href="https://doi.org/10.1088/1361-6595/ab8fbb" target="_blank" >https://doi.org/10.1088/1361-6595/ab8fbb</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/ab8fbb" target="_blank" >10.1088/1361-6595/ab8fbb</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Popis výsledku v původním jazyce

A bipolar HiPIMS discharge with a rectangular positive voltage pulse (with controllable amplitude, delay after the main negative pulse and positive pulse length) was systematically investigated by mass spectroscopy. The time-averaged spectra of ions measured at the substrate position exhibit a prominent high-energy peak. It is shown that the position of the peak can be varied by the positive pulse amplitude, its magnitude scales with the pulse length and its width can be slightly influenced by the length of the delay interval. Measurements of the plasma potential at the mass spectrometer position and time-resolved mass spectroscopy clearly show that the high-energy peak is formed by ions accelerated by the elevated plasma potential during the positive pulse. In addition, fine details of the ion energy distribution functions related to the plasma potential transients at the start of the positive pulse are identified.

Název v anglickém jazyce

Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Popis výsledku anglicky

A bipolar HiPIMS discharge with a rectangular positive voltage pulse (with controllable amplitude, delay after the main negative pulse and positive pulse length) was systematically investigated by mass spectroscopy. The time-averaged spectra of ions measured at the substrate position exhibit a prominent high-energy peak. It is shown that the position of the peak can be varied by the positive pulse amplitude, its magnitude scales with the pulse length and its width can be slightly influenced by the length of the delay interval. Measurements of the plasma potential at the mass spectrometer position and time-resolved mass spectroscopy clearly show that the high-energy peak is formed by ions accelerated by the elevated plasma potential during the positive pulse. In addition, fine details of the ion energy distribution functions related to the plasma potential transients at the start of the positive pulse are identified.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science & Technology

ISSN

0963-0252

e-ISSN

—

Svazek periodika

29

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000541901800001

EID výsledku v databázi Scopus

2-s2.0-85087763595