Analysis of optical properties of carbon films by spectroscopic ellipsometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F20%3A43958649" target="_blank" >RIV/49777513:23520/20:43958649 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Analysis of optical properties of carbon films by spectroscopic ellipsometry

Popis výsledku v původním jazyce

The aim of the project was analysis of optical properties of 11 carbon films (different preparation conditions, different substrates) deposited on a titanium interlayer. The properties were analyzed in the visible as well as in the infrared. The project is related to the activities of the industrial partner in the field of fuel cells, and specifically the interest in the properties of carbon films is motivated by the efforts to easily and quickly evaluate their thickness by measuring their reflectance. Measurements were performed by spectroscopic ellipsometry (change of light polarization after its reflection from a material). For each analyzed film, these raw data were used to obtain the dependencies of its refractive index and extinction coefficient on the wavelength. The results were independently crosschecked by comparing the reflectance predicted in this way with the reflectance measured by spectrophotometry. The dependence of the reflectance on the thickness was predicted as well, confirming the aforementioned possibility to use reflectometry in order to measure thickness.

Název v anglickém jazyce

Analysis of optical properties of carbon films by spectroscopic ellipsometry

Popis výsledku anglicky

The aim of the project was analysis of optical properties of 11 carbon films (different preparation conditions, different substrates) deposited on a titanium interlayer. The properties were analyzed in the visible as well as in the infrared. The project is related to the activities of the industrial partner in the field of fuel cells, and specifically the interest in the properties of carbon films is motivated by the efforts to easily and quickly evaluate their thickness by measuring their reflectance. Measurements were performed by spectroscopic ellipsometry (change of light polarization after its reflection from a material). For each analyzed film, these raw data were used to obtain the dependencies of its refractive index and extinction coefficient on the wavelength. The results were independently crosschecked by comparing the reflectance predicted in this way with the reflectance measured by spectrophotometry. The dependence of the reflectance on the thickness was predicted as well, confirming the aforementioned possibility to use reflectometry in order to measure thickness.

Druh

V_souhrn - Souhrnná výzkumná zpráva

CEP obor

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OECD FORD obor

20506 - Coating and films

Projekt

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Návaznosti

N - Vyzkumna aktivita podporovana z neverejnych zdroju

Rok uplatnění

2020

Kód důvěrnosti údajů

C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.

Počet stran výsledku

15

Místo vydání

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Název nakladatele resp. objednatele

IHI Ionbond Netherlands b.v.

Verze

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