Analysis of refractive index, extinction coefficient and thickness of carbon films by spectroscopic ellipsometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43970890" target="_blank" >RIV/49777513:23520/23:43970890 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Analysis of refractive index, extinction coefficient and thickness of carbon films by spectroscopic ellipsometry

Popis výsledku v původním jazyce

The aim of the project was analysis of optical properties of 7 carbon films deposited on a titanium interlayer. The project is related to activities of the industrial partner in the field of hydrogen fuel cells. The properties were analyzed in the visible as well as in the infrared. Measurements were performed by spectroscopic ellipsometry (change of light polarization after its reflection from a material). For each analyzed film, these raw data were used to obtain the dependencies of its refractive index and extinction coefficient on the wavelength, its thickness and surface roughness. Complementary measurements were performed by spectrophotometry, whose results were used to confirm the correctness of measured properties.

Název v anglickém jazyce

Analysis of refractive index, extinction coefficient and thickness of carbon films by spectroscopic ellipsometry

Popis výsledku anglicky

The aim of the project was analysis of optical properties of 7 carbon films deposited on a titanium interlayer. The project is related to activities of the industrial partner in the field of hydrogen fuel cells. The properties were analyzed in the visible as well as in the infrared. Measurements were performed by spectroscopic ellipsometry (change of light polarization after its reflection from a material). For each analyzed film, these raw data were used to obtain the dependencies of its refractive index and extinction coefficient on the wavelength, its thickness and surface roughness. Complementary measurements were performed by spectrophotometry, whose results were used to confirm the correctness of measured properties.

Druh

V_souhrn - Souhrnná výzkumná zpráva

CEP obor

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OECD FORD obor

20501 - Materials engineering

Projekt

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Návaznosti

N - Vyzkumna aktivita podporovana z neverejnych zdroju

Rok uplatnění

2023

Kód důvěrnosti údajů

C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.

Počet stran výsledku

11

Místo vydání

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Název nakladatele resp. objednatele

IHI Ionbond Netherlands b.v.

Verze

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